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发明名称
MEASURING METHOD AND APPARATUS FOR THIN FILM
摘要
申请公布号
JPH04357404(A)
申请公布日期
1992.12.10
申请号
JP19910041211
申请日期
1991.02.13
申请人
RICOH CO LTD
发明人
ISOBE TAMI
分类号
G01B11/06;G01N21/21;G01N21/41
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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