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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04356945(A)
申请公布日期
1992.12.10
申请号
JP19910130113
申请日期
1991.06.01
申请人
MITSUBISHI ELECTRIC CORP
发明人
II YOSHIKO;MATSUURA MASAZUMI
分类号
H01L21/316;H01L21/768
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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