| 发明名称 |
ETCHING METHOD |
| 摘要 |
|
| 申请公布号 |
JPH04356923(A) |
申请公布日期 |
1992.12.10 |
| 申请号 |
JP19910130122 |
申请日期 |
1991.06.03 |
| 申请人 |
SONY CORP |
发明人 |
KADOMURA SHINGO |
| 分类号 |
H01L21/302;H01L21/3065 |
主分类号 |
H01L21/302 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
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