| 摘要 |
PURPOSE:To contrive to improve the humidity resistance, the corrosion resistance and the mechanical strength of a magnetic resistance element by a method wherein a multilayer film consisting of a metal foil, which is the outest layer of the magnetic resistance element and has a specific permiability lower than the prescribed value and a strong mechanical strength, is used as a protective film to be used for coating the ferromagnetic thin film conductors. CONSTITUTION:Ferromagnetic thin film conductors 7 are formed on a glass substrate 6 and inorganic passivation films 11 are formed thereon except the part of a bonding pad 12. Moreover, a metal foil 15 is adhered thereon using an adhesion layer 14 combined with an organic passivation film. The metal foil 15, which has a specific permiability of 50 and has been made of stainless steel, is constituted in a condition protruding higher than the circumferences of the substrate 6 at the parts other than the pad 12. The circumferences of the metal foil 15 are further coated and protected with an organic bonding agent 16, epoxy resin, for example, for the purpose of preventing it for water, gas etc., to intrude therein from the circumferences of the substrate 6. |
