| 摘要 |
PURPOSE:To achieve a display in color similar to that of light detected when a detecting ray for surface analysis is visible light. CONSTITUTION:A wavelength spectrum of fluorescence which is radiated from a sample 3 excited by an electron beam and a visible wavelength range is divided into a plurality of sections beforehand. A video lookup table which has a three-primary color structure of one color representing a section for every section is prepared to determine a display color of the fluorescence detected depending on which section the fluorescence spectrum obained by a detection means belongs to. |
