Poly(para-t-butoxycarbonyl-oxystyrene) and method of making it.
摘要
<p>Provided is a poly(para-t-butoxycarbonyloxystyrene) having recurring units of the formula: <CHEM> which is prepared by anionic polymerization of para-t-butoxycarbonyloxystyrene. The polymer is of a controlled molecular weight and a narrow molecular weight distribution and has a high degree of resolution and development, meeting the requirements of resist materials. The method allows for simple preparation of such polymers.</p>
