Circulation type gas purification apparatus and method of operating the same.

摘要

This invention relates to purification of a multicomponent gas while purifying and circulating a gas medium, such as a laser gas medium or the like. An object of the present invention is to provide a gas laser apparatus operating method and a gas laser apparatus in which it is easy to keep the laser output power constant for a long time. Disclosed is a method which performs laser oscillation while circulating a laser multicomponent gas medium containing a rare gas and in which the laser gas medium is circulated through an adsorbent (10) which has been refrigerated to a temperature where all the components of the laser gas medium necessary for laser oscillation are not solidified. <IMAGE>