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发明名称
ISOTHERMAL CAPACITANCE TRANSIENT SPECTRAL ANALYSIS
摘要
申请公布号
JPH04355358(A)
申请公布日期
1992.12.09
申请号
JP19910157569
申请日期
1991.06.01
申请人
HORIBA LTD
发明人
YOKOYAMA KAZUNARI
分类号
G01N27/22;G01N27/24;H01L21/66
主分类号
G01N27/22
代理机构
代理人
主权项
地址
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