| 摘要 |
<p>The method of forming a microlens made of a thermoplastic resin on a solid-state imaging device (1), includes the steps of forming a resist pattern (3a) having an opening (4) as a microlens forming portion on the solid-state imaging device (1), filling the opening (4) with the thermoplastic resin (2a), removing the resist pattern (3a), and thermally deforming the thermoplastic resin (2a) in the opening (4). With the method according to the invention a microlens having a desired shape can be formed with a fine lens pattern of 0.5 mu m or less uniformly and highly accurately. <IMAGE></p> |
