发明名称 SURFACE MICROSCOPE
摘要 A surface microscope comprising a device (4, 6, 10, 11, 12), which brings a probe (1, 30) close to a surface of a sample (2) to scan it therewith, producing a tunnel current (I) between the probe and the sample to measure the superficial shape of the sample by detecting the tunnel current; a device (3, 7, 11, 12) for varying a gap between the probe and the sample; menas (4, 5, 8) for detecting a variable component ( DELTA I) of the tunnel current varying, accompanied by variations in the gap by the means for varying same; dividing means (6) for calculating the ratio ( DELTA I/I) of said variable component of the tunnel current to the tunnel current; means (7, 25, 26) for calculating tunnel barrier information, based on the quotient ( DELTA I/I) obtained by the dividing means; and display means (19, 20, 21) for displaying the superficial shape of the sample measured by the means for measuring the superficial shape of the sample and the tunnel barrier information calculated by the means for calculating same.
申请公布号 EP0401852(A3) 申请公布日期 1992.12.09
申请号 EP19900110884 申请日期 1990.06.08
申请人 HITACHI, LTD. 发明人 HOSAKA, SUMIO;HOSOKI, SHIGEYUKI;HASEGAWA, TSUYOSHI, HITACHI DAIYON KYOSHINRYO
分类号 G01B7/34;G01B7/00;G01D21/02;G01N27/00;G01N27/02;G01N37/00;G01Q30/04;G01Q60/04;G01Q60/10;G01Q60/24;G01R31/302;H01J37/00;H01J37/28;(IPC1-7):G01N27/02 主分类号 G01B7/34
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