发明名称 SEMICONDUCTOR DEVICE PROVIDED WITH SCHOTTKY JUNCTION
摘要 PURPOSE:To obtain a semiconductor capable of operating at a high speed and possessing a rectifying function by a method wherein the semiconductor possesses a Schottky junction composed of a metal electrode and a semiconductor region, and the electrode concerned formed of single crystal whose main component is Al. CONSTITUTION:A silicon oxide layers 305 and 307 are provided onto the surface of an N layer 303. An opening is provided so as to make a part of the N layer 303 exposed, a single crystal Al formed on the exposed part of the N layer 303 to constitute a Schottky junction between the N layer 303 and the single crystal Al. A P<+> layer 306 is provided under the junction of the anode electrode formed of single crystal Al with a silicon oxide layer 305 which serves as an insulating film striding the junction concerned. In this case, as the anode electrode is formed of single crystal Al coming into contact with the N layer 303 including the junction of the N layer 303 with the P<+> layer 306, am excellent Schottky junction enhanced in interface characteristics can be formed.
申请公布号 JPH04355965(A) 申请公布日期 1992.12.09
申请号 JP19910184173 申请日期 1991.06.28
申请人 CANON INC 发明人 NAKAMURA YOSHIO;KIKUCHI SHIN;NISHIMURA SHIGERU
分类号 H01L21/285;H01L21/28;H01L29/47;H01L29/78;H01L29/872;H01L29/93 主分类号 H01L21/285
代理机构 代理人
主权项
地址