| 发明名称 |
METHOD AND APPARATUS FOR PROCESSING A MINUTE PORTION OF A SPECIMEN |
| 摘要 |
An image of a specimen which is to be processed is detected by a near-field optical scanning microscope. An image with extremely high resolution for identifying a minute portion of several tens nm is detected. The detected minute portion is processed by, for example, a tunnel current of a scanning tunneling microscope. <IMAGE> |
| 申请公布号 |
EP0459392(A3) |
申请公布日期 |
1992.12.09 |
| 申请号 |
EP19910108685 |
申请日期 |
1991.05.28 |
| 申请人 |
HITACHI, LTD. |
发明人 |
YAMAGUCHI, HIROSHI;NOGUCHI, MINORI;KOHNO, MAKIKO, OF NO.203 SUTOOKU-HAIMU;NAKATA, TOSHIHIKO |
| 分类号 |
G01Q10/00;G01Q30/02;G01Q30/16;G01Q60/12;G01Q60/18;G01Q60/22;G01Q60/56;G01Q70/10;H01J37/28;(IPC1-7):G02B21/00;G01N27/00;G01N21/17 |
主分类号 |
G01Q10/00 |
| 代理机构 |
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