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发明名称
GLOW-DISCHARGE FILM FORMING DEVICE
摘要
申请公布号
JPH04354878(A)
申请公布日期
1992.12.09
申请号
JP19910157909
申请日期
1991.05.31
申请人
KYOCERA CORP
发明人
HIGUCHI HISASHI;OKAWA KAZUMASA;OKUBO DAIGORO
分类号
C23C16/50;C23C16/52;G03G5/08
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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