| 摘要 |
PURPOSE:To remove dirts in a tube by mounting a cleaning brush formed by enclosing ferromagnetic substance with acid resistant fiber on the inner wall of a tube by an attracting tool located outside of the tube and sliding the brush while rotating the tube in the cleaning solution. CONSTITUTION:A cleaning brush 21 formed by enclosing a strong magnet with fiber of acid resistant material such as Teflon or the like and an attracting tool 22 are mounted on the outer wall of a quartz tube used for the heat treatment of a wafer. The tube 5 is suitably rotated in the cleaning solution 2, the latter is contained in the fiber of the brush 21, and the tool 22 is reciprocatingly slided in a direction (a). Thus, phosphorus glass 3 and dirts 4 adhered onto the inner wall of the tube 5 are rubbed off as designated by (b). When a variety of types of cleaning brushes are prepared, the adhered dirts can be completely removed on the inner wall even in the vicinity of the inlet of the tube 5 in a short time. |
