| 摘要 |
<p>PURPOSE:To provide an etching drum in which a plurality of wafers contained in a basket can be simultaneously and automatically transferred to a basket. CONSTITUTION:A movable housing 17 rotatable to a housing 11 of an etching drum 3, is provided, a set bar 20 to be engaged with the outer peripheries of wafers W,... is installed in the housing 17, and a drive mechanism for rotatably driving the housing 17 is provided. The housing 17 and the bar 20 installed in the housing 17 constitute a mechanism for opening and closing the drum 3. Since the opening/closing mechanism is automatically driven by the drive mechanism, the wafers W contained in the basket are simultaneously and automatically transferred to the drum 3.</p> |
