发明名称 Memory device having bit lines over a field oxide
摘要 A memory device having an array of memory cells each including a trench capacitor and a pass transistor. The transistor has its source connected to the storage capacitor, its drain connected to a bit line, and its gate connected to a word line. The bit line is formed over a field oxide layer formed on the semiconductor substrate so there is minimal contact between the bit line and the semiconductor substrate. The storage dielectric in the trench is recessed from the surface of the semiconductor substrate.
申请公布号 US5170372(A) 申请公布日期 1992.12.08
申请号 US19920870158 申请日期 1992.04.15
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 WONG, MAN
分类号 H01L27/108 主分类号 H01L27/108
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