| 摘要 |
<p>PURPOSE:To check a short circuit between mask patterns electrically and speedily by providing a conductive mask pattern on the surface of a transparent sheet. CONSTITUTION:The mask pattern of a semiconductor integrated circuit is formed by printing an insulating transparent sheet 1 of 'Mylar(R)', etc., with conductive ink by a silk screen system. A short-circuit check can, therefore, be made by using an ammeter by applying a voltage to the mask pattern. For example, when a VDD wiring mask pattern 3a and a GND wiring mask pattern 4 short-circuit at 5a, the voltage is applied from a power source 7 and the ammeter 6 measures and detects the current. Consequently, when the mask pattern of the color key is checked, a defective place can be found speedily and more accurately.</p> |
