| 摘要 |
PURPOSE:To detect the level of a bonding face with high accuracy. CONSTITUTION:The displacement in the up-and-down direction of an arm holder which has held a capillary is detected one after another by using a linear sensor. It is investigated whether changes C1, C2,... Cn in an output data within a detected range B of the number of definite readout operations are within a definite permissible range C. When they are within the definite permissible range C, the range is judged to be a bonding face. |
