| 摘要 |
PURPOSE:To provide a word-line constitution wherein a word line can easily be microworked and to provide its manufacturing method. CONSTITUTION:A word line in memory cell array parts 2i,... is formed in such a way that a silicon dioxide film 3 is sandwiched between a main word line Wi and subword lines Wij,... which are composed of a tungsten silicide film which is microworked easily. The signal of the main word line is amplified in a part other than the memory cell array parts and transmitted to the subword lines. A laminated film by the tungsten silicide film and the silicon dioxide film in the memory cell array parts is worked simultaneously to the shape of the word line. |
