SPIN COATING AND SPIN COATING DEVICE,申请号JP19910125882-传众专利搜索

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发明名称	SPIN COATING AND SPIN COATING DEVICE
摘要
申请公布号	JPH04349970(A)	申请公布日期	1992.12.04
申请号	JP19910125882	申请日期	1991.05.29
申请人	CANON INC	发明人	KASHIWAZAKI AKIO;SHIBA SHOJI
分类号	B05C11/08;B05D1/40	主分类号	B05C11/08
代理机构		代理人
主权项
地址

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