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发明名称
SEMICONDUCTOR MANUFACTURING APPARATUS
摘要
申请公布号
JPH04349633(A)
申请公布日期
1992.12.04
申请号
JP19910123476
申请日期
1991.05.28
申请人
MATSUSHITA ELECTRON CORP
发明人
TAMURA YOSHIKAZU;NAKAOKA HISASHI;ARAKI HIDEO
分类号
H01L21/60;H01L21/321
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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