| 摘要 |
PURPOSE:To obtain the tester capable of quantitatively detecting surface peeling and crack change produced at the time when a specimen to be tested such as an IC package is alternately bathed in high and low temperature constant temperature baths. CONSTITUTION:A plurality of constant temperature baths 6, 7 set at certain temperatures of high and low temperatures, a sandwiching means 3 for sandwiching a specimen 1 to be tested, an AE sensor 2 provided in the sandwiching means 3 so as to be arranged out of the constant temperature baths 6, 7 when the sandwiching means 3 is inserted into the constant temperature baths 6, 7 and an actuator 5 for taking in and out the sandwiching means 3 for sandwiching a specimen 1 to be tested in the inside of the constant temperature baths 6, 7 of the high and low temperatures are equipped for the heat cycle tester. |
