POLYCRYSTALLINE SILICON THIN FILM AND MANUFACTURE THEREOF, AND THIN FILM TRANSISTOR USING SAME,申请号JP19910123316-传众专利搜索

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发明名称	POLYCRYSTALLINE SILICON THIN FILM AND MANUFACTURE THEREOF, AND THIN FILM TRANSISTOR USING SAME
摘要
申请公布号	JPH04349618(A)	申请公布日期	1992.12.04
申请号	JP19910123316	申请日期	1991.05.28
申请人	TONEN CORP	发明人	NAGAHARA TATSURO
分类号	H01L21/20;H01L21/336;H01L29/78;H01L29/786	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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