| 摘要 |
PURPOSE:To obtain an accurate sensor generating no temp. drift without using a printed circuit board by directly forming a circuit pattern to the surface of a heater built-in ceramic substrate. CONSTITUTION:A circuit pattern consisting of the respective resistors and wirings in a sensor circuit and an amplifying circuit amplifying a sensor output signal is directly formed on a ceramic heater 3 wherein a heater 2 is embedded in a ceramic substrate 1. Further, a circuit part 9 formed as a hybrid IC wherein a semiconductor gas rate sensor element 6 and circuit element 7, 8 necessary for the amplifying circuit are incorporated is constituted. By this constitution, an accurate sensor output signal can be obtained without generating a temp. drift. |
