SPIN COATER FOR MANUFACTURE OF SEMICONDUCTOR,申请号JP19910120627-传众专利搜索

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发明名称	SPIN COATER FOR MANUFACTURE OF SEMICONDUCTOR
摘要
申请公布号	JPH04348513(A)	申请公布日期	1992.12.03
申请号	JP19910120627	申请日期	1991.05.27
申请人	NEC YAMAGATA LTD	发明人	TAKEDA HIDENORI
分类号	B05C11/08;G03F7/16;H01L21/027;H01L23/38;H01L35/00	主分类号	B05C11/08
代理机构		代理人
主权项
地址

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