FORMATION OF HIGH TEMPERATURE SUPERCONDUCTING THIN FILM

摘要

PURPOSE:To form an a-axis oriented thin film of an oxide superconductor excellent in crystallinity and electrical characteristics by laser beam vapor deposition. CONSTITUTION:An a-axis oriented lower thin layer 1 of an oxide superconductor is previously formed on a substrate 3 by a method other than laser beam vapor deposition under conditions optimum for the formation of an a-axis oriented thin film and an a-axis oriented upper thin layer 2 of the same oxide superconductor is formed on the layer 1 under conditions optimum for laser beam vapor deposition. An a-axis oriented oxide superconducting thin film of the oxide superconductor having excellent crystallinity and electrical characteristics can be formed.