LASER INTERFERENCE-TYPE ENCODER,申请号JP19910037916-传众专利搜索

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发明名称	LASER INTERFERENCE-TYPE ENCODER
摘要
申请公布号	JPH04348225(A)	申请公布日期	1992.12.03
申请号	JP19910037916	申请日期	1991.02.07
申请人	NIKON CORP	发明人	KITAJIMA EIICHI
分类号	G01B11/00;G01D5/38	主分类号	G01B11/00
代理机构		代理人
主权项
地址

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