| 摘要 |
PURPOSE:To enhance the quality of mirror-surface finishing by reducing straight line-like or band-like streaks which are likely to generate in a part where the paths of a polishing tool overlap with each other. CONSTITUTION:A polishing head positioning means 30 moves a polishing head in X- and Y-axial directions. A random number generating means 20 determines the movement of the polishing head at random. With the use of these random number generating means 20 and the polishing head positioning means 30, the polishing head is randomly moved so as to move a polishing tool which is held on the polishing head and is rotated can be moved laterally and longitudinally on a surface to be mirror-surface finished. Accordingly, straight line-like or band-like streaks which generates on the surface in parts where the paths of the polishing tool overlaps with each other are directed in random ways so that the streaks are dispersed over the surface to be mirror-surface polished in its entirety. |
