| 摘要 |
PURPOSE:To obtain an angular velocity sensor utilizing the vibration of piezoelectric elements which is mechanically strong and has a small temperature drift,. CONSTITUTION:This angular velocity sensor is provided with driving metallic plates 1, 2, having driving piezoelectric elements 5, 6 fixedly bonded at least at one surfaces thereof, detecting metallic plates 3, 4 having detecting piezoelectric elements 7, 8 rigidly bonded at one surfaces thereof, bonding members 9, 10 for bonding the driving metallic plates 1, 2 with the detecting metallic plates 3, 4, and an elastic bonding member 20 for bonding the bonded elements into the structure of a tuning fork. The driving piezoelectric elements 5, 6 are arranged at positions not to be in touch with the bonding members 9, 10. |
