| 摘要 |
PURPOSE:To provide a discharge excitation gas laser device which embodies uniform discharge in a large cross section and enhances higher efficiency of laser oscillation and enables stabilized laser oscillation to be obtained even during highly repeated operation. CONSTITUTION:First and second main electrodes 1 and 2 are installed to generate main discharge in a laser gas in such a fashion that they may be opposed to each other. At least two different types of preliminary electrolytic disassociation sources, which use different preliminary electrolytic disassociation systems, are installed to an opposed side of the main discharge side of one main electrode out of the first and second main electrodes. |
