发明名称 Sputtering device.
摘要 <p>A sputter coating system employing a vacuum chamber. A movable surface is provided within the chamber which is adapted for mounting substrates and moving them thereon. At least one magnetron sputtering device is positioned at a work station adjacent to the substrate holder and adapted for sputtering at least a selected material onto the substrate. At least a second device is positioned adjacent the first device for providing a plasma for enhancing the plasma formed by the first device. &lt;IMAGE&gt;</p>
申请公布号 EP0516436(A2) 申请公布日期 1992.12.02
申请号 EP19920304870 申请日期 1992.05.28
申请人 DEPOSITION SCIENCES, INC. 发明人 BARTOLOMEI, LEROY A.;READ, THOMAS;SHEVLIN, CRAIG
分类号 C23C14/35;C23C14/00;C23C14/06;C23C14/08;C23C14/50;C23C14/56;C23C14/58;H01J37/34 主分类号 C23C14/35
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