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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH04346452(A)
申请公布日期
1992.12.02
申请号
JP19910119776
申请日期
1991.05.24
申请人
MITSUBISHI ELECTRIC CORP
发明人
YANO SHUICHI
分类号
G01R31/26;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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