THIN FILM REMOVING DEVICE,申请号JP19910148169-传众专利搜索

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发明名称	THIN FILM REMOVING DEVICE
摘要
申请公布号	JPH04346411(A)	申请公布日期	1992.12.02
申请号	JP19910148169	申请日期	1991.05.24
申请人	NIKON CORP	发明人	MOGI KIYOSHI
分类号	G03F7/20;H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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