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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04346271(A)
申请公布日期
1992.12.02
申请号
JP19910149769
申请日期
1991.05.23
申请人
HITACHI LTD;HITACHI MICOM SYST:KK
发明人
KOBAYASHI KENJI;OZAWA KAZUO;IHARA TAKANOBU
分类号
H01L21/28;H01L21/3205;H01L23/52;H01L29/43
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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