PROCESS FOR DEPOSITING A FILM CONTAINING BORON AND NITROGEN,申请号EP19920106759-传众专利搜索

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发明名称	PROCESS FOR DEPOSITING A FILM CONTAINING BORON AND NITROGEN
摘要
申请公布号	EP0510567(A3)	申请公布日期	1992.12.02
申请号	EP19920106759	申请日期	1992.04.21
申请人	SOLVAY DEUTSCHLAND GMBH;FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.	发明人	DOELLEIN, GUENTHER;WEIDENBACH, GUENTER;MEYER, HANS;BRINGMANN, UDO;WEBER, ANDREAS;KLAGES, CLAUS-PETER
分类号	C23C16/34;C23C16/38;C23C16/511;(IPC1-7):C23C16/34;C07F5/02;C23C14/06;C23C16/50	主分类号	C23C16/34
代理机构		代理人
主权项
地址

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