| 摘要 |
<p>PURPOSE:To stably obtain a lithography which has no omission, stain of the lithography and eliminates correction of the lithography in a later step. CONSTITUTION:In a lithography method for plotting an electronic circuit pattern on a board by moving a lithography nozzle 1 having paste discharging pressure regulating means 4, a standard lithography condition for an electronic circuit standard pattern is stored in arithmetic control means 7, and a paste discharging pressure trial condition of lithography to be manufactured by a mass production is set based on the stored condition. Further, a lithography device is controlled by the condition to form a trial lithography, and the lithography is measured by camera measuring means 2. The measured result is applied to the means 7, which compares the measured result with the standard pattern to be plotted, and repeatedly sequentially corrects the paste discharging pressure trail condition so as to be adapted for the standard pattern, and the mass production condition of the paste discharging pressure of the regulating means is decided.</p> |
