METHOD OF COATING SUBSTRATE WITH HYDROCARBON PERFLUORIDE POLYMER FILM AND COATED SUBSTRATE

摘要

PURPOSE: To perfectly execute integrating processing within a vacuum chamber by arranging a substrate and an operation electrode in the chamber so as to supply gaseous and polimerizable perfluorohydrocarbon polymer into the chamber and depositing a perfluorohydrocarbon polymer film onto the substrate. CONSTITUTION: A first working electrode 2 and a second electrode 3 are provided within the vacuum chamber. The first working electrode 2 and the second electrode 3 are made of aluminum or quartz. A chamber wall and an electrode surface are coated with perfluorohydrocarbon polymer film 13. The thickness of the film 13 such as polytetrafluoroethylene on the chamber wall and the electrode is perferably about 2 to 3 micron. Gaseous perfluorohydrocarbon polymer is introduced into the chamber and about 100 to 100W radio frequency power is applied to the working electrode. At the time of depositing, the pressure in the chamber is kept at about 10 to 180mTorr and self-bias at the working electrode is about -50 to about -700V.