| 摘要 |
<p>PURPOSE:To obtain a data analysis system of an electron beam microanalyzer which performs identification of elements from a characteristic X-ray spectrum chart and comparison of constituent elements of each kind of material in a short time and accurately by providing a known specimen database. CONSTITUTION:A characteristic X-rays spectrum or a theoretical wavelength of a known specimen is stored into known specimen databases 8-10, the characteristic X-ray spectrum, where an unknown specimen is measured by an electron rays micro analyzer, is stored into a database 11 of the unknown specimen spectrum, and the characteristic X-ray spectrum which is retrieved from the database 11 of the unknown specimen spectrum is shown on a display 2 by a computer 1. The characteristic X-ray spectrum or a theoretical wavelength of a specific known specimen is retrieved from the known specimen databases 8-10 and is shown on the display 2, thus enabling the characteristic X-ray spectrum of the unknown specimen to be analyzed.</p> |
