| 摘要 |
PURPOSE:To improve the detection sensitivity and rigidity of a high energy ray detector. CONSTITUTION:A penetration hole 13 is formed on the frame 1 at the position of a notch on a wafer 2 and so a space with a certain volume is formed here. As wire bonding is layed on this point, the wire is arranged in the space when detection elements are layered in the same direction. A concave groove is formed from the upper surface on the frame 1 at the point of the notch on the wafer 2 and so a space with a certain volume is formed. As wire bonding is layed on this point, the wire is arranged in the space when detection elements are layered in the opposit direction one by one.
|
