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发明名称
JIG REPAIR CHAMBER-EQUIPPED CLEAN ROOM
摘要
申请公布号
JPH04344047(A)
申请公布日期
1992.11.30
申请号
JP19910114559
申请日期
1991.05.20
申请人
FUJITSU LTD
发明人
FUJIE NOBUO;AIGOU MASAYOSHI
分类号
E04H5/02;F24F7/06;H01L21/02
主分类号
E04H5/02
代理机构
代理人
主权项
地址
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