发明名称 MOVING EQUIPMENT
摘要 <p>PURPOSE:To enable precise and quick moving process concerning a moving equipment wherein a moving body is positioned by using position sensors. CONSTITUTION:In a moving equipment wherein a moving body 11 travels on a rail 15 by the driving force of a servomotor 12, a motor rotation control encoder 16, which roughly detects the position of the moving body 11, is installed on the servomotor 12, and position detection sensors 19a-19d are installed at stop positions of the moving body 11 on the rail 15. An encoder plate 18 is installed on a moving body 11, and the highly precise position of the moving body 11 is detected by using said encoder plate 18 and the position detection sensors 19a-19d.</p>
申请公布号 JPH04340743(A) 申请公布日期 1992.11.27
申请号 JP19910113484 申请日期 1991.05.17
申请人 FUJITSU LTD 发明人 SATO YOSHIYASU
分类号 G01B7/00;H01L21/68 主分类号 G01B7/00
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