MANUFACTURE OF EPITAXIAL GROWTH WAFER,申请号JP19910142582-传众专利搜索

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发明名称	MANUFACTURE OF EPITAXIAL GROWTH WAFER
摘要
申请公布号	JPH04342116(A)	申请公布日期	1992.11.27
申请号	JP19910142582	申请日期	1991.05.17
申请人	SONY CORP	发明人	OHASHI MASANORI
分类号	H01L21/20;H01L21/322;H01L27/148	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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