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发明名称
VACUUM DEPOSITION DEVICE
摘要
申请公布号
JPH04341564(A)
申请公布日期
1992.11.27
申请号
JP19910142594
申请日期
1991.05.19
申请人
ULVAC JAPAN LTD
发明人
ARAKANE MITSUAKI
分类号
C23C14/54
主分类号
C23C14/54
代理机构
代理人
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地址
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