IMPURITY-CONCENTRATION COMPUTATION METHOD DURING HEAT TREATMENT IN OXIDIZING ATMOSPHERE,申请号JP19910142474-传众专利搜索

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发明名称	IMPURITY-CONCENTRATION COMPUTATION METHOD DURING HEAT TREATMENT IN OXIDIZING ATMOSPHERE
摘要
申请公布号	JPH04342124(A)	申请公布日期	1992.11.27
申请号	JP19910142474	申请日期	1991.05.17
申请人	SHARP CORP	发明人	TAKAI HIROYUKI
分类号	H01L21/225	主分类号	H01L21/225
代理机构		代理人
主权项
地址

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