| 摘要 |
PURPOSE:To provide the high-quality stamper which is damageless and is small in density by simultaneously executing removing of foreign matter and washing by using an ice grain generator for producing ice particles. CONSTITUTION:The stamper 2 sticks automatically to a spinner 1 and the spinner 1 rotates at a set rotating speed when a controller 3 is operated. The fine particles of ice having 5 to 100 m grain size are sprayed through a supply pipe 5 after the specified time. The foreign matter, such as resist, is hardened, shrunk and peeled by the cooling effect and spraying pressure and is flushed away together with the dissolved water of the ice. Dry oxygen is blown from a supply pipe 6 to dry the stamper after the prescribed time and thereafter, the spinner 1 stops automatically. The attraction is then released and the washing stage is completed. |
