METHOD FOR PURIFYING AROMATIC HYDROCARBON VAPOR

摘要

PURPOSE:To extremely enhance the purity of aromatic hydrcarbon vapor such as toluene or xylene inclusive benzene used as a raw material for preparing a diamond film according to the use and purpose thereof by perfectly removing a very small amount of oxygen contained in aromatic hydrocarbon or aromatic hydrocarbon vapor diluted with nitrogen, hydrogen or argon as impurity. CONSTITUTION:Aromatic hydrcarbon vapor or aromatic hydrocarbon vapor diluted with hydrogen, nitrogen or argon is brought into contact with a catalyst based on copper to efficiently remove oxygen contained in said vapor as impurity.