| 摘要 |
<p>PURPOSE:To accurately position and hold a wafer carriage by a method wherein, while a protrusion part is being guided by a claw part at a clamp part, it is inserted into the side face of an insertion groove in a fixation jig which is wider than the protrusion part at the wafer carriage and which is crossed perpendicularly. CONSTITUTION:In a wafer carriage 1, holding shelves 11 into which many wafers are inserted by keeping their intervals, and a protrusion part 13 which is nearly H-shaped and which is provided with a perpendicularly crossed part is formed on the bottom face an insertion groove 3 which is a little wider than the width of the protrusion part 13 and which is provided with a nearly H-shaped and perpendicularly crossed part is formed on the surface. When the wafer carriage 1 is fixed to the fixation jig 2, the wafer carriage 1 is gripped by using a gripping device, and the protrusion part 13 installed on the bottom face 12 is inserted into the insertion groove 3 in fixation jig 2. Since the protrusion part 13 is pressed by the compressive force of a compression spring 43 to the side opposite to a stopper part 5. As a result, the wafer carriage 1 is held by the stopper part 5 and a claw part 41.</p> |
