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发明名称
INSPECTING DEVICE FOR FOREIGN MATTER
摘要
申请公布号
JPH04339246(A)
申请公布日期
1992.11.26
申请号
JP19910139637
申请日期
1991.05.15
申请人
FUJIKURA LTD
发明人
GOTO KAZUHIKO;TAKAHASHI SUSUMU
分类号
G01B11/30;G01N21/88;G01N21/94;G01N21/95
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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