| 摘要 |
PURPOSE:To feed back the state coated with a cementing material of a lead frame to a control system, to control the discharge amount of the cementing material in such a way that the coating amount of the cementing material is always constant, to reduce the number of chips of cementing failure as few as possible and to contrive the improvement of the yield of production of a semiconductor chip in the manufacturing device of a semiconductor device, in particular the device for cementing lead frame and the semiconductor chip to each other, and the cementing material coating device of the device for cementing the frame and the chip to each other. CONSTITUTION:A manufacturing device of a semiconductor device is provided with a discharge means 11 for discharging a cementing material 11A on a sample 18, an optical means 12 for emitting light L1 on the sample 18 coated with the cementing material 11A and a light source 13 for supplying the light L1 to the means 12. Moreover, the manufacturing device is provided with a detecting means 14 for detecting reflected light L2 from the sample 18 and a control means 15 for controlling the input/output of the means 11 and 12, the light source 13 and the means 14 and the means 15 is constituted including that it controls the output of the means 11 on the basis of the reflected light L2 detected in a dark field. The means 14 is constituted including that it consists of an optical detecting element 14A arranged in the form of matrix in a line direction CX a row direction R and an optical detecting element 14B arranged linearly in the row direction R.
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