| 摘要 |
PURPOSE:To reduce influence of thermal expansion due to an added mass and adhere the added mass to a mass surface easily. CONSTITUTION:A cantilever 7 with a frame 5 for sensing vibration is provided, a distortion gauge 2 is placed at a portion where a stress is generated of the cantilever 7, and a spherical added mass 8 is sealed on a surface of the frame 5, thus enabling the mass of the frame 5 to be increased, the cantilever 7 to be deformed readily responding to vibration due to acceleration, and acceleration to be detected by the distortion gauge 2. Sealing of the added mass 8 and the frame 5 is caused by contact between a spherical body and a plane. Since the contact area is small, influence which is given to the frame 5 becomes small even if the added mass 8 is thermally expanded and a possibility where offset temperature characteristics are generated at the sensor is small. The added mass 8 and the surface of the frame 5 are adhered by allowing a mask where a hole of a diameter which is slightly larger than an outer diameter of the spherical added mass 8 is provided to be positioned while the hole is matched to the surface of the frame 5 and then positioning after the spherical added mass 8 is placed inside the hole. |
